Chuck for supporting and retaining a test substrate and a...

Details Chuck for supporting and retaining a test substrate and a... Chuck for supporting and retaining a test substrate and a...

2011-08-16

2011-08-16

Nguyen, Vinh P (Department: 2858)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S750010, C324S750020

Reexamination Certificate

active

07999563

ABSTRACT:
A chuck for supporting and retaining a test substrate includes a device for supporting and retaining a calibration substrate. The chuck comprises a first support surface for supporting a test substrate and a second support surface, which is laterally offset to the first support surface, for supporting a calibration substrate The calibration substrate has planar calibration standards for calibration of a measuring unit of a prober, and dielectric material or air situated below the calibration substrate at least in the area of the calibration standard. In order to be able to take the actual thermal conditions on the test substrate and in particular also on known and unknown calibration standards and thus the thermal influence on the electrical behavior of the calibration standard used into consideration, the second support surface is equipped for temperature control of the calibration substrate.

REFERENCES:
patent: 5414370 (1995-05-01), Hashinaga et al.
patent: 5963027 (1999-10-01), Peters
patent: 6468098 (2002-10-01), Eldridge
patent: 6825681 (2004-11-01), Feder et al.
patent: 7038441 (2006-05-01), Stoll et al.
patent: 7187188 (2007-03-01), Andrews et al.
patent: 7518358 (2009-04-01), Dunklee
patent: 2003/0071631 (2003-04-01), Alexander
patent: 2008/0007285 (2008-01-01), Nakase et al.

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