Chuck for holding a device under test

Details Chuck for holding a device under test Chuck for holding a device under test

2005-11-15

2005-11-15

Karlsen, Ernest (Department: 2829)

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

C324S754090

Reexamination Certificate

active

06965226

ABSTRACT:
A chuck for a probe station that include a first chuck assembly element defining a substantially planar upper and lower surfaces, and another chuck assembly element defining a substantially planar surface. The chuck includes a spacing mechanism having exactly three independent supports interconnecting the first chuck assembly element and the another chuck assembly element defining the spacing between the first chuck assembly element and the another chuck assembly element in such a manner that the substantially planar lower surface of the first chuck assembly element and the substantially planar upper surface of the another chuck assembly element are in opposing relationship with respect to one another.

REFERENCES:
patent: 5091691 (1992-02-01), Kamieniecki et al.
patent: 5410259 (1995-04-01), Fujihara et al.
patent: 6320372 (2001-11-01), Keller

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