Measuring and testing – Gas analysis – Detector detail
Reexamination Certificate
2002-09-02
2008-08-05
Williams, Hezron (Department: 2856)
Measuring and testing
Gas analysis
Detector detail
Reexamination Certificate
active
07406856
ABSTRACT:
A metal oxide semiconductor gas sensor and a method for production thereof. The sensor comprises a sensor-active metal oxide thin layer applied to a substrate, in contact with at least one electrode. The sensor-active metal oxide thin layer comprises a chromium/titanium oxide (CTO) layer with a thickness of about 10 nm to about 1 μm. The chromium and titantium layers are applied over each other using thin layer technology and are subsequently tempered.
REFERENCES:
patent: 4967589 (1990-11-01), Yagawara et al.
patent: 5003812 (1991-04-01), Yagawara et al.
patent: 5918261 (1999-06-01), Williams et al.
patent: 44 24 342 (1995-11-01), None
patent: 197 10 456 (1998-08-01), None
patent: 197 18 584 (1998-11-01), None
patent: 199 44 410 (2001-04-01), None
patent: 1 067 377 (2001-01-01), None
patent: 2 202 948 (1998-10-01), None
patent: WO 00/24677 (2000-05-01), None
patent: WO 01/38867 (2001-05-01), None
Baratto, C. et al.; “Front-side Micromachined porous silicon nitrogen dioxide gas sensor”; Thin Solid Films; 391, Elsevier Sequoia, S.A., Jul. 16, 2001, pp. 261-264.
Henshaw, G.S. et al.; “Selectivity and Composition Dependence of Response of Gas-sensitive Resistors”; Part 2.-Hydrogen Sulfide Response of Cr2−xTixO3+y: J. Mater. Chem., 1995, 5(11), pp. 1791-1800.
Jayaraman, V. et al.; “Preparation and characterisation of Cr2−xTixO3+δand its sensor properties”; Sensors and Actuators B 55, Elsevier Sequoia, S.A., May 11, 1999, pp. 175-179.
Li, Yongxiang et al.; “Gas Sensing Properties of P-type Semiconducting Cr-doped Ti02Thin Films”; Transducers '01. Eurosensors XV. 11TH International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers, Proceedings of 11TH International Conference on Solid State Sensors and Actuators Transducers '01 Eurosensors, XV, Munich, Germany, Jun. 10-14, 2001; pp. 840-843.
Sberveglieri, G.; “Recent developments in semiconducting thin-film gas sensors”, Sensors and Acuators B 23, Elsevier Sequoia, S.A., Feb. 1, 1995, pp. 103-109.
Sberveglieri, G. et al.; “Sn1−xFexOy: a new material with high carbon monoxide sensitivity” Sensors and Acuators B Chemical B20, Nos. 2/3; Jun. 1994, pp. 163-167.
Sharma, Rajnish K. et al.; “Mechanism of highly sensitive and fast response Cr doped TiO2oxygen gas sensor”, Sensors and Acuators B Chemical B45, 1997, pp. 209-215.
Bottner Harald
Kuhner Gerd
Wollenstein Jurgen
Barnes & Thornburg LLP
Frank Rodney
Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung
Williams Hezron
LandOfFree
Chromium/titanium oxide semiconductor gas sensor and method... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Chromium/titanium oxide semiconductor gas sensor and method..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Chromium/titanium oxide semiconductor gas sensor and method... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4013257