Chromium-silicon oxide thin film resistors

Details Chromium-silicon oxide thin film resistors Chromium-silicon oxide thin film resistors

1975-10-20

1976-12-07

Albritton, C. L.

Electrical resistors

With base extending along resistance element

Resistance element coated on base

29620, 156 11, 338314, 427103, 427124, 427126, H01C 700

Patent

active

039965511

ABSTRACT:
An arrangement of thin film resistive layers for hybrid microcircuits that liminates electrical contact problems and provides a means for obtaining high precision by trimming. A thin resistive film is deposited on an insulating substrate over a mask. Without breaking vacuum, a second resistive film which is not subject to oxidation is deposited over the first resistive film. The second resistive film is then etched away from portions which are not used as contact points. Since the second resistive material has a different resistivity, it is also used for low value resistive portions in multiple resistor networks.

REFERENCES:
patent: 3398032 (1968-08-01), Glang et al.
patent: 3742120 (1973-06-01), Keister et al.

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