Compositions – Electrically conductive or emissive compositions – Free metal containing
Patent
1981-06-30
1983-07-12
Mayewsky, Volodymyr Y.
Compositions
Electrically conductive or emissive compositions
Free metal containing
29620, 204192F, 219543, 338309, 252518, 427102, 428428, H01B 106
Patent
active
043929923
ABSTRACT:
Improved thin film resistors and electrical devices and circuits with thin film resistors are fabricated utilizing a chromium, silicon, and nitrogen compound formed preferably by rf reactive sputtering of chromium and silicon in a nitrogen bearing atmosphere. An annealing step is used to produce time-stable resistance values and in combination with variations in the partial pressure of nitrogen during sputter deposition to control the temperature coefficient of resistivity to have positive, negative or zero values.
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E. R. Olson et al. "Nitrides of Chromium and Chromium-Titanium Alloys", Journal of Electro-Chemical Soc., vol. 102, No. 2, pp. 73-76, Feb. 1955.
Hughes David W.
Paulson Wayne M.
Handy Robert M.
Mayewsky Volodymyr Y.
Motorola Inc.
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