Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate
2011-08-23
2011-08-23
Pritchett, Joshua L (Department: 2872)
Optical: systems and elements
Compound lens system
With curved reflective imaging element
C359S656000
Reexamination Certificate
active
08004756
ABSTRACT:
A catadioptric objective includes a plurality of optical elements arranged along an optical axis to image a pattern from an object field in an object surface of the objective to an image field in an image surface region of the objective at an image-side numerical aperture NA with electromagnetic radiation from a wavelength band around a central wavelength λ<300 nm. The optical elements include a concave mirror and a plurality of lenses. The projection objective forms an image of the pattern in a respective Petzval surface for each wavelength λ of a wavelength band, the Petzval surfaces deviating from each other for different wavelengths. The plurality of lenses include lenses made from different materials having substantially different Abbe numbers. A longitudinal departure p of the Petzval surface at a given wavelength from a planar reference surface at an edge field point of the image field (at maximum image height y′) measured parallel to the optical axis in the image surface region, varies with the wavelength λ according to: dp/dλ<(15λ/NA2)
m.
REFERENCES:
patent: 620978 (1899-03-01), Schupmann
patent: 4469414 (1984-09-01), Shafer
patent: 6451507 (2002-09-01), Suenaga et al.
patent: 6636350 (2003-10-01), Shafer et al.
patent: 6665126 (2003-12-01), Shafer et al.
patent: 6909492 (2005-06-01), Omura
patent: 6995918 (2006-02-01), Terasawa et al.
patent: 7760425 (2010-07-01), Epple
patent: 2003/0011755 (2003-01-01), Omura et al.
patent: 2004/0160677 (2004-08-01), Epple et al.
patent: 2006/0098298 (2006-05-01), Kato et al.
patent: 19939088 (2000-02-01), None
patent: 0902329 (1999-03-01), None
patent: 1 069 448 (2001-01-01), None
patent: 1227354 (2002-07-01), None
patent: 1 480 065 (2004-11-01), None
patent: WO 2005/040890 (2005-05-01), None
Carl Zeiss SMT GmbH
Pritchett Joshua L
Sughrue & Mion, PLLC
LandOfFree
Chromatically corrected catadioptric objective and... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Chromatically corrected catadioptric objective and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Chromatically corrected catadioptric objective and... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2644103