Chopperless operation of a thermal infrared radiation sensor sys

Details Chopperless operation of a thermal infrared radiation sensor sys Chopperless operation of a thermal infrared radiation sensor sys

1997-08-08

2000-03-21

Hannaher, Constantine

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

2503383, H01L 27146

Patent

active

060405775

ABSTRACT:
Highly thermally isolated pixel-array radiation sensor elements, preferably each (i) KTN material with (ii) an optional radiation-wavelength-tuned absorption coating (iii) suspended above a common substrate by surface micromachining, are continuously illuminated with thermal radiation from a scene so as to each come to an associated thermal equilibrium temperature, and so as to each produce an associated electrical signal. Each and every sensor is occasionally, preferably periodically on the order of seconds, momentarily, typically on the order of milliseconds, subjected to a thermal pulse, preferably as is generated by discharge of an associated local capacitor into a typically polysilicon local resistor. In accordance with the material used, and the "gain" of the thermal sensor element, the heat pulse will produce a large change in the electrical signal from which charge the equilibrium temperature, even if very small and even if resulting from long-wavelength low-energy thermal radiation, is accurately deduced. A sensor element typically 80 .mu.m square typically has thermal conductivity in the range of range of 6.times.10.sup.-13 to 8.times.10.sup.-13 W/.degree. K., and heat capacity in the range of 4.times.10.sup.-14 J/.degree. K. to 7.times.10.sup.-14 J/.degree. K.

REFERENCES:
patent: 5075549 (1991-12-01), Pines
patent: 5367167 (1994-11-01), Keenan
patent: 5486698 (1996-01-01), Hanson et al.

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