Chlorosilane and hydrogen reactor

Details Chlorosilane and hydrogen reactor Chlorosilane and hydrogen reactor

1992-06-01

1999-05-25

Warden, Robert

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Including specific material of construction

501 90, 501 95, B01J 1902, C04B 3552

Patent

active

059067993

ABSTRACT:
The present invention is a reactor for the hydrogenation of chlorosilanes at temperatures above about 600.degree. C. The reactor comprises one or more of the following improvements: (1) a reaction chamber formed from a silicon carbide coated carbon fiber composite, (2) a heating element formed from a silicon carbide coated carbon fiber composite, and (3) one or more silicon nitride insulators electrically insulating the heating element.

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The Condensed Chemical Dictionary; rev. by Hawley, G.G., 1971; pp. 168-169 & 426.

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