Chloro-fluoro-carbon liquid jetting immersion cleaning apparatus

Cleaning and liquid contact with solids – Apparatus – With treating fluid purifying or separating means

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Details

134166R, 134135, 134184, 134200, B08B 302

Patent

active

048671860

ABSTRACT:
This invention relates to a cleaning apparatus for cleaning workpieces such as semiconductors and other electronic devices, or automobile parts, hydraulic implement parts and other die-cast products. A workpiece is completely immersed in chloro-fluoro-carbon (R113) liquid acting as cleaning liquid stored in a cleaning tank, and the cleaning liquid is caused to jet out of injection nozzles under pressure against portions of the workpiece to be cleaned. This immersion cleaning effectively removes cutting powder, abrasive materials and other such substances persistently clinging to the workpiece. This apparatus is capable of an efficient cleaning treatment which is achieved by reducing consumption and loss of the cleaning liquid.

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