Chloro-fluoro-carbon cleaning apparatus

Details Chloro-fluoro-carbon cleaning apparatus Chloro-fluoro-carbon cleaning apparatus

1989-11-06

1990-01-23

Coe, Philip R.

Cleaning and liquid contact with solids

Apparatus

With heating, cooling or heat exchange means

34 77, 134 60, 134109, 134184, 202170, 202200, B08B 310

Patent

active

048951765

ABSTRACT:
This invention relates to a cleaning apparatus for cleaning workpieces such as semiconductors and other electronic devices by using chloro-fluoro-carbon solvent such as R113. Chloro-fluoro-carbon vapor is drawn from a lateral position of a layer of chloro-fluoro-carbon vapor through a suction duct and is cooled and liquefied in a collecting tank. The resulting liquid is returned to a cleaning tank through a return duct. This feature allows the gas generated from the chloro-fluoro-carbon vapor to be collected for repeated use, reduces the amount of chloro-fluoro-carbon solvent consumption, and prevents air pollution by the chloro-flouoro-carbon gas. Further, the entire apparatus may readily be constructed as a unit, thus at low manufacturing cost.

REFERENCES:
patent: 2977962 (1961-04-01), Zucker
patent: 3085948 (1963-04-01), Kearney
patent: 3229702 (1966-01-01), Murdoch, Jr.
patent: 3308839 (1967-03-01), Barday
patent: 4029517 (1977-06-01), Rand
patent: 4055196 (1977-10-01), Kearney

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