Chip tester with improvements in handling efficiency and measure

Details Chip tester with improvements in handling efficiency and measure Chip tester with improvements in handling efficiency and measure

1995-02-13

1996-10-01

Wieder, Kenneth A.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324754, 324765, G01R 3102

Patent

active

055613861

ABSTRACT:
A chip tester comprises a stage which is attached to an end of an arm and on which a chip is disposed, a reversing mechanism which rotates the arm from a first position to a second position and reverses a surface of the stage so as to look from upward to downward and vice versa, a vertical drive mechanism which moves the reversing mechanism vertically, and a probe head having pin-electrodes arranged under the second position of said arm as to face pad-electrodes of the chip looking downward. The chip tester further comprises an auxiliary system for assisting alignment of the chip with the probe head, the auxiliary system comprising an image pickup device arranged above the stage at the first position for picking up an image of the chip surface, and a monitor and a controller, these being operatively coupled with each other. The chip tester still further comprises improvement in a chip guide for easy and precise positioning of the chip onto the stage, and improvement in the prove head for enhancing precision of a high frequency test for the chip.

REFERENCES:
patent: 4589815 (1986-05-01), Smith
patent: 4893074 (1990-01-01), Holt et al.
patent: 5030869 (1991-07-01), Holt et al.
patent: 5087878 (1992-02-01), Belmore, III et al.
patent: 5321351 (1994-06-01), Swart et al.
patent: 5374888 (1994-12-01), Karasawa
patent: 5410259 (1995-04-01), Fujihara et al.
patent: 5440943 (1995-08-01), Holt et al.
patent: 5450017 (1995-09-01), Swart

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