Chip scale marker and method of calibrating marking position

Details Chip scale marker and method of calibrating marking position Chip scale marker and method of calibrating marking position

2006-10-24

2006-10-24

Heinrich, Samuel M. (Department: 1725)

Electric heating

Metal heating

By arc

C219S121680, C438S015000

Reexamination Certificate

active

07126083

ABSTRACT:
A chip scale marker including a laser system, a wafer holder supporting a wafer to be processed, and a camera moving above the wafer holder by being connected to an X-Y stage and monitoring the wafer supported on a center hole of the wafer holder, the chip scale marker includes a unit detachably arranged on a laser beam path from the laser system and reducing power density of a laser beam, and a screen arranged on a center hole of the wafer holder and indicating a position where a laser beam from the laser system is irradiated.

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