Chip registration mechanism

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Details

H01L 2342, H01L 2344, H01L 2346

Patent

active

046009361

ABSTRACT:
A chip registration mechanism may form a part of a carrier for retaining in position a plurality of integrated circuit chips in row and column fashion having identification codes on one surface thereof, such that the chip codes may be read and cooperate with a tray having multiple cells, with each cell receiving an individual integrated circuit chip, or function to position a single chip relative to a reference surface for processing. A chip registration base member includes a pedestal projecting upwardly from a base member within a cavity having transverse dimensions oversized relative to the chip and defining at least one lateral reference surface. A lid extends across the top of the member partially defines the cavity above the chip with the chip resting on the top of the pedestal. Inclined nozzles carried by the pedestal function to jet air from the pedestal top surface against the bottom of the chip to create an air film to support the chip and to impart a force laterally to move the edge of the chip against the cavity reference surface. A relief channel about the base of the pedestal open to the atmosphere prevents flutter of the chip and insures accurate registration contact of the edge of the chip against the cavity reference surface. The same nozzle carried by the pedestal function to vacuum the bottom of the chip against the pedestal top surface to clamp the chip in this orientation.

REFERENCES:
patent: 3717381 (1973-02-01), Hagler
patent: 3776394 (1973-12-01), Miller
patent: 3982627 (1976-09-01), Isohata
patent: 4062462 (1977-12-01), Hentz et al.
patent: 4242038 (1980-12-01), Santini et al.
patent: 4395165 (1983-07-01), DeRobertis et al.
IBM Technical Disclosure Bulletin vol. 16, No. 9, Feb. 1974, NY, USA, A. Mack et al "Wafer Stop", p. 2906.

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