Chip bonding method and apparatus

Metal fusion bonding – With means to juxtapose and bond plural workpieces – Plural discrete workpieces

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228 495, 29743, H01L 2150

Patent

active

055799809

ABSTRACT:
Method and apparatus for removing a chip from a bonding stage of a bonding machine via a vacuum suction of a collet upon exceeding a predetermined heating time so as to avoid thermal damage of the chip. The collet which vacuum-chucks the chip is moved vertically and then circularly by means of a combination of a drive shaft, a cam follower and a cylindrical cam holder so that the vacuum-chucked chip can be returned to the bonding stage or be transferred to other places.

REFERENCES:
patent: 4878610 (1989-11-01), Mori et al.

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