Metal fusion bonding – With means to juxtapose and bond plural workpieces – Plural discrete workpieces
Patent
1994-07-22
1996-12-03
Heinrich, Samuel M.
Metal fusion bonding
With means to juxtapose and bond plural workpieces
Plural discrete workpieces
228 495, 29743, H01L 2150
Patent
active
055799809
ABSTRACT:
Method and apparatus for removing a chip from a bonding stage of a bonding machine via a vacuum suction of a collet upon exceeding a predetermined heating time so as to avoid thermal damage of the chip. The collet which vacuum-chucks the chip is moved vertically and then circularly by means of a combination of a drive shaft, a cam follower and a cylindrical cam holder so that the vacuum-chucked chip can be returned to the bonding stage or be transferred to other places.
REFERENCES:
patent: 4878610 (1989-11-01), Mori et al.
Heinrich Samuel M.
Kabushiki Kaisha Shinkawa
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