Chemisorptive metal alloy and method of using the same

Chemistry of inorganic compounds – Modifying or removing component of normally gaseous mixture – Molecular oxygen or ozone component

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423210, 423230, 423247, 423248, 423239, 420492, C01B 707

Patent

active

051820897

ABSTRACT:
A chemisorptive metal alloy includes from about 30% to about 70% by weight of Ti and/or Zr and from about 30% to about 70% by weight of Cu. Optionally, the alloy may also contain from 0% to about 5% by weight of Fe; from 0% to about 10% by weight of Ni; from 0% to about 5% of V; and from 0% to about 5% of Cr.
A method of purifying a reactive gas and removing foreign impurities therefrom includes conducting the impurities containing reactive gas, such as chlorine, hydrogen chloride, silane and dichlorosilane, through a bed of the above described pulverized metal alloy and removing the impurities from the gas by chemisorption on the alloy.

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patent: 4594231 (1986-06-01), Nishiho et al.
patent: 4910001 (1990-03-01), Kitahara et al.
patent: 5019364 (1991-05-01), Kitahara et al.
patent: 5080875 (1992-01-01), Bernauer

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