Chemically formed self-aligned structure and wave guide

Details Chemically formed self-aligned structure and wave guide Chemically formed self-aligned structure and wave guide

1987-06-09

1988-08-23

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437228, 437238, 350 9612, 156628, H01L 2120

Patent

active

047660937

ABSTRACT:
The formation of a self-aligned semiconductor structure in a semiconductor substrate is described by providing a first and a second layer or a wave guide of different chemical composition above said semiconductor substrate, said second layer providing a shape defining opening permitting chemical conversion of said first layer adjacent said substrate to a third chemical composition different from said first and second layers. The third chemical composition is removed with a reagent that reacts only with said third composition and not with said first and second layers for the manufacture of self-aligned semiconductor structures. The third chemical composition is retained in the formation of a wave guide and has an index of refraction different from the first layer.

REFERENCES:
patent: 3820871 (1974-06-01), Croset et al.
patent: 3883219 (1975-05-01), Logan et al.
patent: 3900944 (1975-08-01), Fuller et al.
patent: 3965279 (1976-06-01), Levinstein et al.
patent: 4333226 (1982-06-01), Abe et al.
patent: 4497107 (1985-02-01), Cogan
patent: 4597003 (1986-06-01), Aine et al.
patent: 4652334 (1987-03-01), Jain et al.
Abbas et al, "Doped Polycrystalline Field Shield Process", IBM Tech. Disc. Bulletin.
Ghondi, VLSI Fabrication Principles, John Wiley & Sons, 1983, N.Y., pp. 437-439, 453-461.
IBM Technical Disclosure Bulletin, vol. 25, No. 11B, Apr. 1983, E. Bassous, et al.

Affiliated with

Also associated with

Rating

Chemically formed self-aligned structure and wave guide does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Chemically formed self-aligned structure and wave guide, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Chemically formed self-aligned structure and wave guide will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-835790