Coating processes – Coating by vapor – gas – or smoke – Organic coating applied by vapor – gas – or smoke
Reexamination Certificate
2005-04-19
2005-04-19
Choi, Ling-Sui (Department: 1713)
Coating processes
Coating by vapor, gas, or smoke
Organic coating applied by vapor, gas, or smoke
C427S255110, C427S255210, C427S248100, C427S309000, C526S346000, C118S724000, C118S725000
Reexamination Certificate
active
06881447
ABSTRACT:
Preparation methods and stabilization processes for low k polymers that consist of sp2C—X and HC-sp3Cα—X bonds. A preparation method is achieved by controlling the substrate temperature and feed rate of the polymer precursors. One stabilization process includes a post annealing of as-deposited polymer films under the presence of hydrogen under high temperatures. The reductive annealing of these films is conducted at temperatures from −20° C. to −50° C. to +20° C. to +50° C. of their Reversible Crystal Transformation (“CRT”) temperatures, then quenching the resulting films to −20° C. to −50° C. below their “CRT” temperatures. The reductive annealing is conducted before the as-deposited film was removed from a deposition system and still under the vacuum. “Re-stabilization” processes of polymer surfaces that are exposed to reactive plasma etching are also disclosed; thus, further coating by barrier metal, cap layer or etch-stop layer can be safely applied.
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Kumar Atul
Lee Chung J.
Choi Ling-Sui
Dielectric Systems Inc.
Kolisch & Hartwell, P.C.
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