Coating processes – Electrical product produced – Welding electrode
Patent
1988-02-10
1989-02-07
Pianalto, Bernard
Coating processes
Electrical product produced
Welding electrode
4272552, 4272553, B05D 306
Patent
active
048030953
ABSTRACT:
An improved chemical vapor reaction system is described. The system is characterized by its light source which radiates ultraviolet light to a substrate to be processed. Before the light source, an obturating plate is placed so that the intensity of the light source is apparently reduced at the center position. With this light, the substrate is irradiated with light having uniform intensity over the surface of the substrate to be processed.
Hayashi Shigenori
Hirose Naoki
Inujima Takashi
Ito Kenji
Ferguson Jr. Gerald J.
Pianalto Bernard
Semiconductor Energy Laboratory Co,. Ltd.
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