Chemical vapor deposition process where an alkaline earth metal

Details Chemical vapor deposition process where an alkaline earth metal Chemical vapor deposition process where an alkaline earth metal

1990-03-08

1992-08-18

Beck, Shrive

Superconductor technology: apparatus, material, process

High temperature , per se

Having tc greater than or equal to 150 k

505734, 427 62, 4271263, 427250, 427252, 4272552, 4272553, H01L 3700, C23C 1618

Patent

active

051399997

ABSTRACT:
A method is disclosed for the volatilization and transport of an alkaline earth metal precursor. The presence of an amine or ammonia significantly increases transport of the voltalized alkaline earth metal precursor as compared to transport under the same conditions but without the amine or ammonia.

REFERENCES:
patent: 4962088 (1990-10-01), Micheli et al.
patent: 4983577 (1991-01-01), Mantese et al.
Dickinson et al., J. Appl. Phys., 66(1): 444-447 (1989).
Berry et al., J. of Crystal Growth, 92: 344-347 (1988).
Zhang et al., Appl. Phys. Lett., 55(12): 1258-1260 (1989).
Tsuruoka et al., Appl. Phys. Lett., 54(18): 1808-1809 (1989).
Meinema et al., 27th Intl. Conf. of Chem. Eng. (1989).
Spee et al., Symp. Proc: Materials Research Society Symp. (1989).

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