Coating processes – Coating by vapor – gas – or smoke – Carbon or carbide coating
Patent
1989-10-23
1991-03-05
Morgenstern, Norman
Coating processes
Coating by vapor, gas, or smoke
Carbon or carbide coating
4272551, 4272552, 4272557, 4272481, 427255, 427314, 427299, 249115, C23C 1600, G02B 508
Patent
active
049976788
ABSTRACT:
A process is disclosed by which the finish and figure of polished preshaped structures (such as mirrors) can be replicated directly by chemical vapor deposition, with only minor polishing of the replica being required to obtain a final product, and with the original substrate being reusable for further replication. Relevant conditions under which the process can be carried out are given. Featured in the process is a pretreatment step prior to the deposition of a layer of silicon carbide to form the replica, which pretreatment step involves the formation on the polished substrate of an oxide layer and a carbon layer of high finish and uniform thickness. The carbon layer allows easy separation of the substrate and replica which otherwise would be bound together.
REFERENCES:
patent: 3905778 (1975-09-01), Pearson
patent: 4142006 (1979-02-01), Choyke et al.
patent: 4426405 (1984-01-01), Hieholzer, Jr.
patent: 4513030 (1985-04-01), Milewski
patent: 4753414 (1988-06-01), McCandless
patent: 4814332 (1989-03-01), Bluege et al.
Keeley Joseph T.
Pickering Michael A.
Taylor Raymond L.
CVD Incorporated
King Roy V.
Morgenstern Norman
White Gerald K.
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