Organic compounds -- part of the class 532-570 series – Organic compounds – Heavy metal containing
Reexamination Certificate
2006-01-24
2006-01-24
Nazario-Gonzalez, Porfirio (Department: 1621)
Organic compounds -- part of the class 532-570 series
Organic compounds
Heavy metal containing
C556S012000, C556S043000, C438S685000, C427S427000, C427S587000
Reexamination Certificate
active
06989457
ABSTRACT:
Tantalum precursors suitable for chemical vapor deposition of tantalum-containing material, e.g., tantalum, TaN, TaSiN, etc., on substrates. The tantalum precursors are substituted cyclopentadienyl tantalum compounds. In one aspect of the invention, such compounds are silylated to constitute tantalum/silicon source reagents. The precursors of the invention are advantageously employed in semiconductor manufacturing applications to form diffusion barriers in connection with copper metallization of the semiconductor device structure.
REFERENCES:
patent: 6015917 (2000-01-01), Bhandari et al.
patent: 6399532 (2002-06-01), Dorer et al.
Baum Thomas H.
Kamepalli Smuruthi
Advanced Technology & Materials Inc.
Chappuis Margaret
Fuierer Tristan A.
Hultquist Steven J.
Nazario-Gonzalez Porfirio
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