Stock material or miscellaneous articles – Composite – Of inorganic material
Patent
1987-03-12
1988-06-14
Childs, Sadie L.
Stock material or miscellaneous articles
Composite
Of inorganic material
4271263, 4272553, 428938, B32B 900, B32B 1900, C23C 1640
Patent
active
047511494
ABSTRACT:
Zinc oxide is applied to a substrate at a low temperature by using a mixture of an organozinc compound and water carried in an inert gas. The resulting zinc oxide film has a relatively low resistivity which can be varied by addition of a group III element.
REFERENCES:
patent: 1420888 (1922-06-01), Straw
patent: 3081200 (1963-03-01), Tompkins
patent: 3655429 (1972-04-01), Deklerk
patent: 3969549 (1976-07-01), Williams et al.
patent: 4051276 (1977-09-01), Williams et al.
patent: 4105810 (1978-08-01), Yamazaki et al.
Lau et al, "Growth of Epitaxial ZnO Thin Films by Organometallic Chemical Vapor Deposition" J. Electrochem. Soc. vol. 127, No. 8, pp. 1843-1847, 1980.
Shealy et al, "Preparation & Properties of Zinc Oxide Films Grown by the Oxidation of Diethylzinc, J. Electrochem. Soc. vol. 128, No. 3, pp. 558-561, 1981.
Roth et al, "Properties of Zinc Oxide Films Prepared by the Oxidation of Diethyl Zinc, J. Appl. Phys. vol. 52, No. 11, pp. 6685-6692, 1981.
Shimizu et al, "Preparation of ZnO Thin Films by Plasma-Enhanced Organo-Metallic Chemical Vapor Deposition", Thin Solid Films, vol. 96, pp. 149-154, 1982.
Smith, "Metalorganic Chemical Vapor Deposition of Oriented ZnO Films Over Large Areas", App. Phys. Lett. vol. 43:1108-1110, 1983.
Blaker Kimberly A.
Halani Arvind T.
Vijayakumar Pantham S.
Wieting Robert D.
Wong Boon
Atlantic Richfield Company
Childs Sadie L.
LandOfFree
Chemical vapor deposition of zinc oxide films and products does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Chemical vapor deposition of zinc oxide films and products, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Chemical vapor deposition of zinc oxide films and products will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-504389