Chemical vapor deposition of zinc oxide films and products

Stock material or miscellaneous articles – Composite – Of inorganic material

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4271263, 4272553, 428938, B32B 900, B32B 1900, C23C 1640

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active

047511494

ABSTRACT:
Zinc oxide is applied to a substrate at a low temperature by using a mixture of an organozinc compound and water carried in an inert gas. The resulting zinc oxide film has a relatively low resistivity which can be varied by addition of a group III element.

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