Chemical vapor deposition of tantalum- or niobium-containing coa

Details Chemical vapor deposition of tantalum- or niobium-containing coa Chemical vapor deposition of tantalum- or niobium-containing coa

1995-05-30

1997-10-14

King, Roy V.

Coating processes

Coating by vapor, gas, or smoke

4272551, 4272552, 4272553, 427314, 4271263, C23C 1600

Patent

active

056770022

ABSTRACT:
Niobium and tantalum compounds suitable for use as chemical vapor deposition source reagents, and a process for depositing niobium- or tantalum-containing coatings using the compounds. The compounds have formula

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