Chemical vapor deposition of mixed metal oxide coatings

Details Chemical vapor deposition of mixed metal oxide coatings Chemical vapor deposition of mixed metal oxide coatings

1988-06-22

1990-05-22

Lusigman, Michael

Coating processes

Coating by vapor, gas, or smoke

Mixture of vapors or gases utilized

4272552, 4272551, 427255, 4272481, 427 62, 427314, 505 1, 505734, 556 43, 556112, 556140, C23C 1600, B05D 512

Patent

active

049276700

ABSTRACT:
Mixed metal oxide films containing Group IIa metals and transition metals are deposited on a heated substrate by a chemical vapor deposition process using alkylcyclopentadienyl metal compound precursors and an oxidizing agent.

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patent: 3061464 (1962-10-01), Norman et al.
patent: 3064020 (1962-11-01), Riemschneider
patent: 3288829 (1966-11-01), Wilkinson
patent: 3914515 (1975-10-01), Kane et al.
patent: 4501602 (1985-02-01), Miller et al.
Berry et al "Formation of high Tc superconducting films by organometallic chemical vapor deposition" Appl. phys. lett. 52(20) May 1988, pp. 1743-1744.
Dryatykh et al "The Synthesis and Vapor Pressures of Trisisoproplcyclopentadienyl Complexes of lanthanum, Praseodymiun, and Neodymium" Russian Journal of Inorganic Chemistry, 25(8) 1980 pp. 1168-1170.
J. L. Vossen, et al., ed., "Thin Film Processes", Academic Press, 1978, pp. 257-331.

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