Chemical vapor deposition of metal pnictogenide films using sing

Details Chemical vapor deposition of metal pnictogenide films using sing Chemical vapor deposition of metal pnictogenide films using sing

1994-07-21

1995-04-25

Beck, Shrive

Coating processes

Coating by vapor, gas, or smoke

427255, C23C 1634

Patent

active

054097355

ABSTRACT:
A process for depositing a film of metal pnictogenide. The process comprises providing a single source of a metal pnictogenide and heating said source to a temperature sufficient to sublime the single source at a pressure selected from a range of about 0.0001 to 760 torr so that a sublimate is delivered into a reaction zone. Within this reaction zone, a substrate is provided upon which deposition may occur. The reaction zone is heated to approximately 200.degree.-800.degree. C. The sublimate is passed through this reaction zone and over the substrate to produce a thin film of metal pnictogenide which is deposited upon the substrate.

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