Chemical vapor deposition of Group IB metals

Coating processes – Heat decomposition of applied coating or base material

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427229, 4272481, 427252, 427314, 556 22, 556116, B05D 302, C23C 1600

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048806706

ABSTRACT:
Coatings of Group IB metals are formed by chemical vapor deposition, in which a heat decomposable organometallic compound of the formula (I) ##STR1## where M is a Group IB metal such as copper, and R is a lower alkyl radical containing from 1 to about 6 carbon atoms, is contacted under nonoxidizing conditions with a heated substrate which is above the decomposition temperature of the organometallic compound. The pure metal is obtained when the compound of the formula I is the sole heat decomposable compound present and deposition is carried out under nonoxidizing conditions. Intermetallic compounds such as copper indium diselenide can be deposited from a copper oxide compound of formula I and a heat decomposable selenium and indium compounds under nonoxidizing conditions. Group II metal oxides and salts, such as barium titanate, are obtainable by deposition from a compound of formula I (and an additional organometallic compound when required) under oxidizing conditions.

REFERENCES:
patent: 2920090 (1960-01-01), Lindstrom et al.
patent: 3071493 (1963-01-01), Whaley et al.
patent: 3914515 (1975-10-01), Kane
patent: 4361497 (1982-11-01), Boldt et al.
patent: 4522932 (1985-06-01), Mitchell

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