Chemical vapor deposition method of producing fluorine-doped tin

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized

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65 6052, 427109, 427166, 427255, C23C 1640

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active

046968377

ABSTRACT:
In accordance with the invention, there is provided herein an improved chemical vapor deposition method for forming fluorine-doped tin oxide coatings using a liquid coating composition which includes a reactive organic fluorine dopant and an organotin compound. The method is carried out under a defined set of process conditions such that the coating produced has a minimum and constant sheet resistance which is substantially independent of deposition temperature.

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patent: 4419386 (1983-12-01), Gordon
patent: 4476158 (1984-10-01), Baumberger et al.
patent: 4500567 (1985-02-01), Kato et al.
patent: 4590096 (1986-05-01), Lindner

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