Chemical vapor deposition method

Details Chemical vapor deposition method Chemical vapor deposition method

1996-10-31

1998-09-01

Derrington, James

Plastic and nonmetallic article shaping or treating: processes

Gas or vapor deposition of article forming material onto...

264610, C23C 1600

Patent

active

058007539

ABSTRACT:
A method and mandrel apparatus for making a unibody containment structure, such as an molecular beam epitaxy cell crucible, with a negative draft portion, via chemical vapor deposition.

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patent: 4217855 (1980-08-01), Takagi
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patent: 4812326 (1989-03-01), Tsukazaki et al.
patent: 4856457 (1989-08-01), Knauer
patent: 5032366 (1991-07-01), Finicle
patent: 5432341 (1995-07-01), Gspann
patent: 5453233 (1995-09-01), Teverovsky
EPI Drawing of Crucible Weldment, EPI 1290 Hammond Road, St. Paul, MN 5510, dated May 18, 1992.

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