Chemical vapor deposition coating of fibers using microwave appl

Details Chemical vapor deposition coating of fibers using microwave appl Chemical vapor deposition coating of fibers using microwave appl

1999-05-26

2000-11-28

Mills, Gregory

Coating apparatus

Gas or vapor deposition

With treating means

118724, 118722, 219690, C23C 1600, H05B 670

Patent

active

061520721

ABSTRACT:
Chemical vapor deposition coating is carried out in a cylindrical cavity. The fibers are heated by a microwave source that is uses a TM0N0 mode, where O is an integer, and produces a field that depends substantially only on radius. The fibers are observed to determine their heating, and their position can be adjusted. Once the fibers are uniformly heated, a CVD reagent is added to process the fibers.

REFERENCES:
patent: 5129359 (1992-07-01), Takei et al.
patent: 5370912 (1994-12-01), Bigelow et al.
patent: 5442160 (1995-08-01), Kimrey, Jr. et al.
patent: 5450205 (1995-09-01), Sawin et al.

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