Chemical vapor deposition apparatus having a susceptor with...

Details Chemical vapor deposition apparatus having a susceptor with... Chemical vapor deposition apparatus having a susceptor with...

2006-07-25

2006-07-25

Hassanzadeh, Parviz (Department: 1763)

Coating apparatus

Gas or vapor deposition

Work support

C118S7230ER

Reexamination Certificate

active

07081165

ABSTRACT:
A chemical vapor deposition apparatus includes a ground voltage source, a susceptor for placing a substrate, a center pin passing through the susceptor for lifting the substrate, and a ground member for connecting the center pin to the ground voltage source.

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