Chemical treatment apparatus

Details Chemical treatment apparatus Chemical treatment apparatus

2009-03-11

2011-11-08

MacArthur, Sylvia R. (Department: 1716)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

For liquid etchant

C156S345110

Reexamination Certificate

active

08052833

ABSTRACT:
A chemical treatment apparatus includes an outer bath; an inner bath, located inside the outer bath; a circulation system, connecting the outer bath to the inner bath; and a draining system, having a first draining pipe and a connecting pipe, wherein the connecting pipe connects the first draining pipe to the circulation system. The suction force generated by a pump of the circulation system is thereby transferred to the first draining pipe. Therefore when the chemical solution is to be drained out from the inner bath, the draining of the chemical solution into the first draining pipe can be quickly done with the aid of the suction force.

REFERENCES:
patent: 6780277 (2004-08-01), Yokomizo et al.
patent: 2006/0042756 (2006-03-01), Miyazaki et al.
patent: 2008/0087645 (2008-04-01), Izuta et al.
patent: 2008/0099144 (2008-05-01), Change et al.
patent: 2010/0122771 (2010-05-01), Chen et al.

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