Chemical supply system and chemical mixing apparatus

Agitating – Having specified feed means – Liquid injector within mixing chamber

Reexamination Certificate

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Details

C366S173100, C366S194000

Reexamination Certificate

active

07025493

ABSTRACT:
A chemical supply system includes at least two supply pipes for supplying at least two different chemicals; a mixing unit connected to the supply pipes for mixing at least two different chemicals to form a chemical mixture, an exhausting unit for exhausing the chemical mixture externally; and a filtering unit provided between the mixing unit and the exhausting unit for filtering the chemical mixture to prevent chemical particles having more than a predetermined size from being exhausted.

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patent: 6106714 (2000-08-01), Chiu et al.
patent: 6221246 (2001-04-01), Shums
patent: 6238279 (2001-05-01), Shau et al.
patent: 6565422 (2003-05-01), Homma et al.

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