Chemical supply apparatus

Details Chemical supply apparatus Chemical supply apparatus

2005-07-19

2005-07-19

Hepperle, Stephen M. (Department: 3753)

Fluid handling

With heating or cooling of the system

Circulating fluid in heat exchange relationship

C137S563000, C137S571000, C137S597000

Reexamination Certificate

active

06918406

ABSTRACT:
The present invention is directed to a chemical supply apparatus including a first tank in which at least two chemicals supplied from each supply bath are mixed, circulating means for circulating the chemicals in the first tank to uniformly mix the chemicals therein, a second tank for storing the mixed solution provided from the first tank, a distributor for distributing the mixed solution to supply the mixed solution to each processing unit, and a heating unit mounted upon a supply line for supplying the mixed solution to the distributor to heat up the mixed solution.

REFERENCES:
patent: 4474476 (1984-10-01), Thomsen
patent: 4483357 (1984-11-01), Rao et al.
patent: 5507310 (1996-04-01), Sordello et al.
patent: 5531242 (1996-07-01), Paganessi
patent: 5800056 (1998-09-01), Suzuki et al.

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