Fluid handling – With heating or cooling of the system – Circulating fluid in heat exchange relationship
Reexamination Certificate
2005-07-19
2005-07-19
Hepperle, Stephen M. (Department: 3753)
Fluid handling
With heating or cooling of the system
Circulating fluid in heat exchange relationship
C137S563000, C137S571000, C137S597000
Reexamination Certificate
active
06918406
ABSTRACT:
The present invention is directed to a chemical supply apparatus including a first tank in which at least two chemicals supplied from each supply bath are mixed, circulating means for circulating the chemicals in the first tank to uniformly mix the chemicals therein, a second tank for storing the mixed solution provided from the first tank, a distributor for distributing the mixed solution to supply the mixed solution to each processing unit, and a heating unit mounted upon a supply line for supplying the mixed solution to the distributor to heat up the mixed solution.
REFERENCES:
patent: 4474476 (1984-10-01), Thomsen
patent: 4483357 (1984-11-01), Rao et al.
patent: 5507310 (1996-04-01), Sordello et al.
patent: 5531242 (1996-07-01), Paganessi
patent: 5800056 (1998-09-01), Suzuki et al.
An Doo-keun
Bae Jeong-yong
DNS Korea Co., Ltd.
Hepperle Stephen M.
LandOfFree
Chemical supply apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Chemical supply apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Chemical supply apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3423693