Cleaning and liquid contact with solids – Apparatus – With means for collecting escaping material
Reexamination Certificate
2005-04-12
2005-04-12
Stinson, Frankie L. (Department: 1746)
Cleaning and liquid contact with solids
Apparatus
With means for collecting escaping material
C134S094100, C134S153000, C134S149000, C134S902000
Reexamination Certificate
active
06877518
ABSTRACT:
A chemical solution treatment apparatus for dissolving and removing ruthenium-based metal adhering to a substrate by a chemical solution, includes: a chemical solution treatment unit; a reservoir unit; and a chemical solution circulation system. The chemical solution inside treatment unit comprises a chemical solution supplying nozzle, and a recovering mechanism. The reservior unit has a structure having a clearence part to be in contact with the chemical solution so that gas components derived from the ruthenium-based metal dissolved and removed in said chemical solution treatment are volatilized outside the chemical solution during circulation of the chemical solution, and comprises an exhaust duct.
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Aoki Hidemitsu
Ishikawa Norio
Mori Kiyoto
Watanabe Kaori
Kanto Kagaku Kabushiki Kaisha
NEC Electronics Corporation
Stinson Frankie L.
Young & Thompson
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