Chemical solution feeding apparatus and method for preparing...

Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...

Reexamination Certificate

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C438S692000, C438S693000

Reexamination Certificate

active

10662450

ABSTRACT:
An apparatus for feeding slurry to an external device. The apparatus includes a preparation tank for preparing the slurry. A circulation pipe is connected to the preparation tank to circulate the slurry. A feeding pipe is connected between the preparation tank and the external device to feed the external device with the slurry. A pump sends the chemical solution in the preparation tank to the circulation pipe and the feeding pipe. A concentration detector is arranged downstream to the pump to detect the concentration of the slurry. A controller controls the concentration of the chemical solution in the preparation tank in accordance with the detection value of the concentration detector and controls the feeding of the chemical solution.

REFERENCES:
patent: 4994212 (1991-02-01), Vos et al.
patent: 5332589 (1994-07-01), Hinnergardt et al.
patent: 5409310 (1995-04-01), Owczarz
patent: 5800056 (1998-09-01), Suzuki et al.
patent: 5924794 (1999-07-01), O'Dougherty et al.
patent: 5992437 (1999-11-01), Takasaki et al.
patent: 6338671 (2002-01-01), Kawashima et al.
patent: 6358125 (2002-03-01), Kawashima et al.
patent: 6554467 (2003-04-01), Snyder et al.
patent: 6721628 (2004-04-01), Lai et al.
patent: 6874929 (2005-04-01), Hiraoka
patent: 2001/0002361 (2001-05-01), Kawashima et al.
patent: 2001/0047821 (2001-12-01), Noji
patent: 2002/0085447 (2002-07-01), Snyder et al.
patent: 2002/0186613 (2002-12-01), Hiraoka et al.
patent: 2005/0142883 (2005-06-01), Hiraoka et al.
patent: 62-215066 (1987-09-01), None
patent: 2-257627 (1990-10-01), None
patent: 8-21825 (1996-01-01), None
patent: 9-33538 (1997-02-01), None
patent: 10-180076 (1998-07-01), None
patent: 11-500846 (1999-01-01), None
patent: 11-126764 (1999-05-01), None
patent: 2000-117635 (2000-04-01), None
patent: 2000-263441 (2000-09-01), None
patent: 2001-225260 (2001-08-01), None
patent: 2001-345296 (2001-12-01), None
patent: 2002-16029 (2002-01-01), None
patent: 94-007702 (1994-08-01), None
Korean Office Action dated Sep. 20, 2007.
Japanese Office Action dated Jan. 22, 2008.

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