Chemical sensor utilizing a surface transverse wave device

Chemical apparatus and process disinfecting – deodorizing – preser – Analyzer – structured indicator – or manipulative laboratory... – Means for analyzing liquid or solid sample

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310311, 310312, 310313D, 73 6145, 73 6149, 422 681, 436149, 436151, G01N 3300, G01N 2700, H01L 4100, H01L 4108

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active

052830373

ABSTRACT:
A sensor suitable for use as a viscosity sensor, a chemically selective sensor, or a chemically specific sensor. The sensor is a surface transverse wave (STW) or Love Wave device that, for solute concentration measurements, includes a chemically reactive layer selected to react with the solute to be measured. The surface trapping structure in this device can include dielectric material either as a protective coating or as the core material of the surface trapping structure. The substrate material and cut are selected so that only shear horizontal acoustic waves are produced. Nonpiezoelectric portions of this device can be utilized in the region in which chemicals react the sensor and/or in the region in which energy is converted between electrical and acoustical forms.

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Shiokawa, S. & Moriizumi, "Design of SAW Sensor in Liquid", Proceedings of the 8th Symposium on Ultrasonic Electronics/Dec. 8-10, 1988, Mar. 27, 1988, Suppl. 27-1, Tokyo, Japan; pp. 142-144.
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