Chemical refill system for high purity chemicals

Details Chemical refill system for high purity chemicals Chemical refill system for high purity chemicals

1994-11-28

1997-03-04

Jacyna, J. Casimer

Fluent material handling, with receiver or receiver coacting mea

Automatic control of flow cutoff or diversion

Level or overflow responsive

141 95, 73308, 73311, 73313, 73319, 137209, 137412, 200 84C, F17C 1300

Patent

active

056070020

ABSTRACT:
A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.

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