Chemical refill system for high purity chemicals

Details Chemical refill system for high purity chemicals Chemical refill system for high purity chemicals

1993-04-28

1995-11-14

Jacyna, J. Casimer

Fluent material handling, with receiver or receiver coacting mea

Automatic control of flow cutoff or diversion

Level or overflow responsive

141 95, 141 67, 141 63, 141 91, 141 21, 137209, 137412, 73308, 73311, 73313, 73319, F17C 1300

Patent

active

054657660

ABSTRACT:
A highly reliable bulk chemical refill system for high purity chemicals is provided. The system employs at least one metallic level sensor in a refillable ampule. The refillable ampule of the present invention comprises a metallic level sensor for sensing a high level or full level in the ampule. The metallic level sensor transmits this signal to a control unit that automatically stops the refilling process. Additionally the refillable ampule includes a low level sensor that either provides an automatic signal for starting the refilling process or an audible or visual alarm to alert an operator that the container is empty and requires refilling. At the same time, the low level sensor sends a signal to the processing equipment indicating the empty state of the ampule. Preferably, due to the need for highly reliable level detection, the low level sensor is a metallic level sensor comprising a two-pole magnetic reed switch capable of interfacing with the existing interface circuitry on the semiconductor processing equipment. Incorporated as another aspect of the invention is a control unit. The control unit includes circuitry for processing the high level signal from the metallic sensor in the refillable ampule to automatically discontinue the refilling process. Additionally the control unit can include circuitry for processing the low level signal and automatically beginning the refilling process.

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