Gas separation: processes – With control responsive to sensed condition – Concentration sensed
Patent
1994-12-14
1995-08-01
Drodge, Joseph W.
Gas separation: processes
With control responsive to sensed condition
Concentration sensed
95273, 134902, B01D 4646
Patent
active
054377102
ABSTRACT:
A chemical processing system for generating ultra-pure chemicals near the site of use. The system includes in series a supply of chemical or the site of use which may be a tank or drum and may be a point of use for semiconductor manufacturing, a concentrate sensor, a pump, a filter, a reactor vessel, and an optional heat exchanger, all connected by Kel-F tubing. Sources of pure filtered gas connect to the reactor vessel. An ozone generator can likewise connect to the reactor vessel. An optional isolation coil can likewise connect between the gas source and the reactor vessel.
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Article in Dec. 1952 Issue of "Modern Plastics", vol. 30, #4, Fluorocarbons-Face, Fame and Fortune, Author Unknown.
Grant Robert W.
Novak Richard E.
Drodge Joseph W.
Submicron Systems Inc.
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