Fluid handling – Systems – Multiple inlet with single outlet
Reexamination Certificate
2005-08-11
2009-06-02
Hepperle, Stephen M (Department: 3753)
Fluid handling
Systems
Multiple inlet with single outlet
C366S107000, C366S340000
Reexamination Certificate
active
07540305
ABSTRACT:
A chemical processing system includes a mixing chamber coupled to the chemical processing system. A stream of first process gas and a stream of second process gas are introduced into the mixing chamber. The stream of first process gas and the stream of second process gas interact with each other to form a mixed process gas, which is supplied to the substrate for processing thereof. A method of mixing process gas in a mixing chamber of a chemical processing system is provided. The method includes injecting a stream of first process gas and a stream of second process gas into the mixing chamber, causing the streams of the first process gas and the second process gas to interact and mixing the first process gas and the second process gas in the mixing chamber to form a mixed process gas. A mixing system is also provided.
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Hepperle Stephen M
Tokyo Electron Limited
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