Chemical mix and delivery systems and methods thereof

Details Chemical mix and delivery systems and methods thereof Chemical mix and delivery systems and methods thereof

2006-03-07

2006-03-07

Bomberg, Kenneth (Department: 3754)

Dispensing

Automatic control

Involving conveying conduit jacket and/or inert atmosphere...

C222S053000, C222S056000, C222S129000, C222S145500, C222S145600

Reexamination Certificate

active

07007822

ABSTRACT:
The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relates to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of supply lines, each supply line having a valve and connecting one of the supply containers to the main reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers.

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