Chemical method for the modification of a substrate surface to a

Details Chemical method for the modification of a substrate surface to a Chemical method for the modification of a substrate surface to a

1991-09-30

1994-05-10

Wilczewski, M.

Fishing, trapping, and vermin destroying

437119, 437964, 437965, 437126, H01L 2120, H01L 21265, H01L 21324, H01L 2184

Patent

active

053106962

ABSTRACT:
A chemical method for the modification of a substrate surface by compound formation to accomplish heteroepitaxial crystal growth is provided. This method enables the growth of semiconductors on insulators allowing fabrication of three dimensionally integrated devices. Devices include vertical FET's for DRAM storage cells, integrated diode laser/FET's, integrated detector/FET's, and common gate CMOS inverters.

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