Chemical mechanical polishing retaining ring with integral...

Details Chemical mechanical polishing retaining ring with integral... Chemical mechanical polishing retaining ring with integral...

2006-08-08

2006-08-08

Wilson, Lee D. (Department: 3723)

Butchering

Sausage making

Stuffing

C451S285000

Reexamination Certificate

active

07086939

ABSTRACT:
In one embodiment, the disclosure is directed to a chemical mechanical polishing retaining ring. The chemical mechanical polishing retaining ring includes a support formed of a first material comprising a first polymer and a wear portion formed of a second material comprising a second polymer. The first material has an elastic modulus greater than the elastic modulus of the second material.

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