Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate
2005-02-08
2009-02-03
Wilson, Lee D (Department: 3723)
Abrading
Abrading process
Glass or stone abrading
C451S028000, C451S287000
Reexamination Certificate
active
07485028
ABSTRACT:
The disclosure is directed to a chemical mechanical polishing retaining ring including a polymer matrix and a filler including polyimide. The chemical mechanical polishing retaining ring has a wear rate performance not greater than about 75 microns/hour.
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Hamilton Colleen E.
Hirschorn Bryan David
Mangaudis Michael John
Wilkinson David
Kim Chi Suk
Larson Newman Abel & Polansky LLP
Saint-Gobain Performance Plastics Corporation
Wilson Lee D
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