Chemical mechanical polishing retaining ring, apparatuses...

Abrading – Abrading process – Glass or stone abrading

Reexamination Certificate

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C451S028000, C451S287000

Reexamination Certificate

active

07485028

ABSTRACT:
The disclosure is directed to a chemical mechanical polishing retaining ring including a polymer matrix and a filler including polyimide. The chemical mechanical polishing retaining ring has a wear rate performance not greater than about 75 microns/hour.

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