Chemical mechanical polishing carrier fixture and system

Details Chemical mechanical polishing carrier fixture and system Chemical mechanical polishing carrier fixture and system

1997-12-01

1999-09-14

Morgan, Eileen P.

Abrading

Machine

Rotary tool

451287, 451397, B24B 4700

Patent

active

059513829

ABSTRACT:
A carrier fixture that does not include transport channels or openings for directing a slurry to a substrate being polished. The carrier fixture may have an inner support coupled to a ring member that contacts a substrate during polishing. The carrier fixture may also have outer supports coupled to the ring member. The carrier fixture is used to manufacture integrated circuits.

REFERENCES:
patent: 3374582 (1968-03-01), Boettcher
patent: 3842544 (1974-10-01), Paola
patent: 5795215 (1998-08-01), Guthrie et al.

Affiliated with

Also associated with

Rating

Chemical mechanical polishing carrier fixture and system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Chemical mechanical polishing carrier fixture and system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Chemical mechanical polishing carrier fixture and system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1503766