Abrasive tool making process – material – or composition – With inorganic material
Reexamination Certificate
2005-07-14
2009-06-23
Marcheschi, Michael A (Department: 1793)
Abrasive tool making process, material, or composition
With inorganic material
C051S309000, C051S298000, C106S003000, C438S691000, C438S692000, C438S693000
Reexamination Certificate
active
07550020
ABSTRACT:
A chemical mechanical polishing aqueous dispersion comprises abrasives in a concentration of not more than 1.5% by mass, wherein the abrasives comprise ceria and have an average dispersed particle diameter of not less than 1.0 μm. A chemical mechanical polishing method comprises polishing an insulating film by the use of the chemical mechanical polishing aqueous dispersion. By the use of the chemical mechanical polishing aqueous dispersion, occurrence of polishing scratches can be suppressed without lowering a removal rate.
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Hattori Masayuki
Ikeda Norihiko
Kawahashi Nobuo
Nishimoto Kazuo
JSR Corporation
Marcheschi Michael A
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
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