Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate
2007-05-29
2007-05-29
Ackun, Jr., Jacob K. (Department: 3723)
Abrading
Abrading process
Glass or stone abrading
C451S060000, C451S287000
Reexamination Certificate
active
11162120
ABSTRACT:
A chemical-mechanical polishing apparatus comprising at least a polishing platen, a polishing pad, a slurry supplying piping, a polishing pad conditioner, a chemical reagent supplying piping and a splitting piping is provided. The polishing platen has a plurality of slurry outlets disposed thereon and the polishing pad is disposed on the polishing platen. The slurry supplying piping is connected to the bottom of the polishing platen for delivering slurry to the surface of the polishing pad through the slurry outlets. The polishing pad conditioner is disposed over the polishing pad. The chemical reagent supplying piping is connected to the polishing pad conditioner for supplying the chemical reagent to the polishing conditioner. The splitting piping is connected between the slurry supplying piping and the chemical reagent supplying piping for providing chemical reagent to the surface of the polishing pad through the slurry supplying piping and the slurry outlets.
REFERENCES:
patent: 6126517 (2000-10-01), Tolles et al.
patent: 2004/0192174 (2004-09-01), Sharples et al.
patent: 2005/0186891 (2005-08-01), Benner
Chen Sheng-Yu
Cheng Chi-Piao
Cheng Chung-Jun
Cheng Po-Yuan
Hung Te-Sung
Ackun Jr. Jacob K.
Jianq Chyun IP Office
United Microelectronics Corp.
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