Chemical-mechanical planarization slurries and powders and...

Plastic and nonmetallic article shaping or treating: processes – Formation of solid particulate material directly from molten... – By extrusion spraying or gravity fall through orifice

Reexamination Certificate

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C264S009000, C252S079100, C438S689000

Reexamination Certificate

active

07037451

ABSTRACT:
Chemical-mechanical planarization slurries and methods for using the slurries wherein the slurry includes abrasive particles. The abrasive particles have a small particle size, narrow size distribution and a spherical morphology and the particles are substantially unagglomerated.

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