Pumps – Motor driven – Fluid motor
Reexamination Certificate
2007-09-14
2011-11-01
Kramer, Devon C (Department: 3746)
Pumps
Motor driven
Fluid motor
C417S383000, C417S395000
Reexamination Certificate
active
08047814
ABSTRACT:
A chemical liquid supplying apparatus which can discharge chemical liquid with high accuracy is provided. The apparatus is used to discharge the chemical liquid in a chemical liquid tank from an application nozzle. The apparatus has a combined member formed integrally with a pump case and a cylinder, and a flexible tube serving as a pump member is provided in the pump case, wherein its inside is a pump chamber and its outside is a pump-side driving chamber. A piston is assembled to the cylinder and when the piston is reciprocated by a motor, the pump chamber is expanded and contracted. A gap between the piston and the cylinder is covered with a diaphragm, and an interior of the diaphragm is a seal space. Therefore, an incompressible medium having leaked from the gap between the piston and the cylinder enters into the seal space and does not leak to the outside.
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An Office Action issued in corresponding Japanese Appln. No. 2006-283555 dated Jun. 14, 2011 (2 pages) and translation.
Bertheaud Peter J
Koganei Corporation
Kramer Devon C
McCormick Paulding & Huber LLP
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