Pumps – Motor driven – Fluid motor
Reexamination Certificate
2011-08-02
2011-08-02
Freay, Charles G (Department: 3746)
Pumps
Motor driven
Fluid motor
C222S207000, C222S214000, C222S399000
Reexamination Certificate
active
07988429
ABSTRACT:
A chemical liquid supply system that prevents the generation of heat during operation in a pump and allows downsizing the discharge pump for instilling a chemical liquid from a tip nozzle. Compressed air is supplied to an upper space of a resist bottle and the chemical liquid is conferred positive pressure and sent out to a pump chamber of a discharge pump, thereby the pump chamber is filled with a resist liquid. This eliminates the need of a conventional construction where a spring or others are used to drive a flexible membrane of the discharge pump to the operation chamber side to take in the resist liquid. As a result, no electric motor is used, so there is obviously no risk of heat damage to a semiconductor wafer and the discharge pump itself can be further downsized.
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Japanese Office Action mailed on Mar. 16, 2010 for Japanese Application No. 2004-232071 w/English translation.
Itoh Shigenobu
Okumura Katsuya
Sugata Kazuhiro
Toyoda Tetsuya
Freay Charles G
Hamo Patrick
Octec Inc.
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
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